Vacuum Products


Oerlikon :

TRIVAC E and B Rotary Vane Vacuum Pumps, Oil-Sealed;

*Special Version Avaliable on request.
- ATEX Version for Explosion Protected and Pressure Burst Resistant
- BCS-PFPE Pump for synthetic lubricants
- B-DOT Pump for Break fluid lubricants


Oerlikon :

SOGEVAC Rotary Vane Vacuum Pumps

Rotary Vane Vacuum Pumps single-stage, Oil-Sealed; 10 - 1200 m3 x h-1 (5.9 - 707 cfm)

Oil sealed rotary vane vacuum pumps are being used in all areas of vacuum engineering. They are equally suited for both industrial production and research applications. They may be used to generate a rough and medium vacuum or as backing pumps in pump combinations with Roots pumps or high vacuum pumps.

The SOGEVAC pumps excel also to their low noise levels and smooth operation.

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Dry Compressing Scroll and Piston Vacuum Pumps

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DIVAC Diaphragm Vacuum Pumps

Divac pumps was developed especially for laboratory operation and as backing pumps for (wide range) turbomolecular pumps. It satisfies the highest expectations in term of precision, reliability and ease of use.

Oerlikon :

ScrewLine Dry Compressing Vacuum Pumps

ScrewLine Dry Compressing Screw Vacuum Pumps for Inductrial Application. Flow rate 250 and 630 m3 x h-1

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E and DK Rotary Piston Vacuum Pumps

Oerlikon :

RUVAC Roots Vacuum Pumps

RUVAC Vacuum Pumps Single-Stage. 250 - 13000 m3 x h-1 (147.3 - 7657 cfm)

For many years, Roots vacuum pumps have been well established in the area of vacuum technology. In combination with backing pumps, which compress against the atmosphere.
These pumps offer the following advantages:
- Shifting the operating Pressure into the high Vacuum Range.
- Multiplied Pumping Speed.

Oerlikon :

RUTA Vacuum Pump Systems

Roots Vacuum Pumps System: Leybold pump combination of roots Vacuum Pumps with backing pumps are called. "RUTA"

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Turbomolecular Pumps

Turbomolecular Pumps 35 - 32001 x s-1
The turbomolecular pumps from Leybold generate a clean high and ultra-high vacuum, are easy to operate and exceptionally reliable. In connection with a well rated backing pump, pressures below 10-10 mbar (0.75 x 10-10 Torr) can be attained.

Oerlikon :

Turbomolecular Pumps Systems / Calibration Systems

PT, CS Turbomolecular Pump System. 30 - 400 1 x S-1 Calibration System
This turbomolecular pump system is a fully assembled and ready-tooperate ultra high vacuum system as a table top unit for processes which require hydrocarbon-free high and ultra high vacuum.

Oerlikon :

DIP Oil Diffusion Pumps

3000 - 50000 1 x s-1 Oil, Baffles, Accessories, Adsorption

The DIP range of pumps was developed for operation in industrial systems. Excellent vacuum performance data combined with the inherent ruggedness of this kind of pump, make our diffusion pumps pumps a reliable component in high and medium vacuum applications.

Oerlikon :

Cryopumps, Cryogenics

Cryopumps are gas entrapment vacuum pumps for the pressure range from 10-3 to < 10-11 mbar (0.75 x 10-3 to ≤ 0.75 x 10-11 Torr).

The principle of operation is that gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping. In order to be able to produce a high or ultra high vacuum the cold surfaces (cryopanels) must be cooled to a sufficiently low temperature. Depending on the type of cooling system used a difference is made between refrigerator cryopumps, bath cryopumps and evaporator cryopumps.

Oerlikon :

Vacuum Fittings and Feedthroughs

Vacuum systems (i.e. systems for pressures ranging from 2.5 bar to 10-9 mbar (1.9 x 10-3 Torr to 0.75 x 10-9 Torr)) are quickly and easily assembled owing to the modular construction principle which is based on interchangeable standard components by means of vacuumtight, demountable flange connections.

Individual components may be exchanged easily at any time. Depending on the intended use and size of the connection, flanges of different types have been developed. The KF flange connection was developed by Leybold many years ago and has been widely accepted by all users of vacuum equipment. This product section lists all flange connections and fittings including adaptors for ultra high vacuum components.

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Vacuum Valves

The long-standing experience of Leybold in the area of vacuum engineering is reflected in the selection and the design of the valves and vacuum protection components for a wide variety of applications.

The range of products is such that a reliable solution can be offered for every vacuum engineering application. Many years of service and the reliability of the valves is ensured by design. Leybold vacuum valves are well-proven in many widely varying areas of research and industry.

Oerlikon :

Total Pressure Gauges

Vacuum Gauges and Control Instruments. 10(-12) - 2000 mbar (10(-12) - 1500 Torr),

These day the total range of vacuum pressure accessible to measurement extends from atmospheric pressure about 1000 mbar (750 Torr) down to 10-12 mbar/Torr (For example, it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges.)

For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten. A difference is made between direct and indirect pressure measurements.

In the case of direct (or absolute) pressure measurements, the readings obtained through the vacuum gauge are independent of the type of gas and the pressure which is to be measured. Common are so-called mechanical vacuum gauges where the pressure is determined directly by recording the force acting on the surface of a diaphragm.

In the case of so-called indirect pressure measurements the pressure is determined as a function of a pressure dependant property of the gas (thermal conductivity, ionization probability, for example). These properties do not only depend on the pressure, but also on the molar mass of the gases. For this reason, the pressure readings obtained through vacuum gauges which rely on indirect pressure measurements, depend on the type of gas. The readings usually relate to air or nitrogen as the measurement gas.

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Leak Testing Instruments

Helium Leak Detectors

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Vacuum Pump Oils

Oil for rotary vane vacuum pumps Lubricatings ... being mechanically stressed.
Overview pump fluids
Mineral oils N62, GS32, GS77
Synthetic oils SHC224
Anderol 555, NC10, DOT4, NC 1/14, HE200

Oil for Diffusion Pumps C11/6 Pump fluids for ... of pressure and be cost-effective.
Overview Pump fluids
Silecone Oil DC704, DC705
Polyphenylether ULTRALEN